Plasma Engineering Laboratory (PEL) is nationally and internationally renowned for our research regarding plasma science. Principal research challenges in PEL are as follows:
- Development of high quality and high throughput processes by controlling reactions in plasma
- Plasma synthesis of functional nanoblocks and their application
- Elucidation of interaction between plasma and interface of materials
- Establish of plasma agriculture
Present research topics are as follows:
- High quality and highly stable hydrogenated amorphous silicon films for thin film solar cells
- Third generation solar cells using nanoparticles
- Deposition profile control in fine structure using anisotropic plasma chemical vapor deposition
- Nanoparticle composite films for ultra low-k film in ULSI
- Fabrication of nanosystems using plasmas
- Mechanism of dust particle formation and transport in fusion devices
- Plasma growth enhancement of plants