Prof. Masaharu Shiratani Doctor of engineering

Engaged in research on plasma science and engineering since 1982. In particular, we have focused on research on in-situ measurement and control of nanoparticles generated in silane plasma used for fabrication of Si thin film solar cells. Recently, it has been shown that nano-particle control can produce unprecedented high-quality a-Si: H. In 2004 and 2005, he engaged in the research and development of nanocrystalline silicon thin-film cells as a contract research of NEDO. He has received a total of 7 awards, including the 3rd Plasma Electronics Award of the Japan Society of Applied Physics, the 2nd Plasma Electronics Award of the Japan Society of Applied Physics, and the 1st Plasma Material Science Award of the Japan Society for the Promotion of Science.

Prof. Kazunori Koga Doctor of science

Engaged in research on generation and growth mechanism of fine particles in plasma at Kyushu University from April 1999. In particular, he was engaged in the development of nanometer-sized particle detection methods. In particular, the following results were obtained. We developed the “cluster-suppressed plasma CVD method” and succeeded in producing an ultra-high quality amorphous silicon thin film at an unprecedented high level. In May 2001, he received the 10th Japan Society of Applied Physics Lecture Encouragement Award, and in 2005 he received the 3rd Plasma Electronics Award of the Japan Society of Applied Physics.

Asst. Prof. Kunihiro Kamataki Doctor of science

  • 2018-present Associate Professor, Department of Electronics, Kyushu University, Fukuoka, Japan
  • 2012- present Member, Center of Plasma Nano-interface Engineering (CPNE), Kyushu University, Fukuoka, Japan
  • 2010-2018 Associate Professor, Faculty of Arts and Science, Kyushu University, Fukuoka, Japan
  • 2008-2010 Research Fellowship for Young Scientists, Japan Society for the Promotion do Science, Japan
Research Interests & Expertise

Plasma Physics/ Plasma science/ Formation mechanism and control of nanoparitcles in processing plasmas/ Fabrication of high-quality thin films/ Surface Science/ Green/Energy related materials/ Machine Learning in Plasma Processing

Research interests include plasma processing of solar cells, plasma material interactions, plasma CVD, dusty plasmas, plasma life-sciences and science education. A leading researcher in “plasma fluctuation in reactive plasma”, manifested by three invited talks were given in three workshops on plasma engineering.

Asst. Prof. Takamasa Okumura Doctor of engineering


  • Technician Daisuke Yamashita
  • Technical staff Chizuru Onishi
  • Technical assistant Emi Yanagawa


  • D3 Nanoka Miyahara
  • D2 Hwang Sung Hwa
  • Working Adults
    Shinya Nakano
  • Working Adults
    Yasuyuki Kawaguchi
  • M2 Hisayuki Hara
  • M2 Tomoya Sato
  • M2 Shota Nagaishi
  • M2 Akihisa Yamamoto
  • M2 Chawarambwa Fadzai Lesley
  • M1 Ryosuke Iwamoto
  • M1 Yusuke Sasaki
  • M1 Tomoaki Yoshida
  • M1 Hao Yuan
  • B4 Sakyo Okunaga
  • B4 Ryo Arita
  • B4 Hayate Tanaka
  • B4 Kohei Abe
  • B4 Masayuki Iguchi
  • B4 Masaya Hiromatsu


  • Assoc. Prof. Naho Itagaki
  • Technical staff Keiko Konishi