The Plasma Engineering Laboratory focuses on research on “Plasma Processes” and “Plasma Anisotropic CVD”, including “Plasma Process”, an important technology in the solar cell industry, which is becoming an industry supporting the 21st century.
Graduate School Infomation Science and Electrical Engineering
Department of Electronic Device Engineering
Nano Integrated System Engineering Course
744 Motooka, Nishi-ku, Fukuoka City, Fukuoka Prefecture